7 results
Accuracy of the Fatigue Lifetime of Polysilicon Predicted from its Strength Distribution
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1245 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1245-A17-02
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- 2010
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Characterization of the Charging and Long Term Performance of Cytop Electret Layers for MEMS Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1134 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1134-BB08-17
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- 2008
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Mechanical Properties and Reliability of Amorphous vs. Polycrystalline Silicon Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1066 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1066-A15-04
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- 2008
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Systematic Characterization of DRIE-Based Fabrication Process of Silicon Microneedles
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1052 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1052-DD07-07
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- 2007
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Reliability of MEMS Materials: Mechanical Characterization of Thin-Films using the Wafer Scale Bulge Test and Improved Microtensile Techniques
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1052 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1052-DD01-02
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- 2007
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Mechanical Characterization of Thin-Film Composites using the Load-Deflection Response of Multilayer Membranes - Elastic and Fracture Properties
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- Journal:
- MRS Online Proceedings Library Archive / Volume 977 / 2006
- Published online by Cambridge University Press:
- 26 February 2011, 977-FF08-08
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- 2006
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Fabrication and Electromechanical Properties of Conductive Polymer Microbridge Actuators
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- Journal:
- MRS Online Proceedings Library Archive / Volume 872 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, J11.3
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- 2005
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